10nm Feedback Stage Controller FC-511
Positioning control with 10nm resolution! Improving reproducibility in inspections and research!
It can be used as a 10nm resolution positioning device in combination with a 10nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
- 企業：シグマ光機
- 価格：500,000 yen-1 million yen
